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SEMI C36-0699 (first published - replaces SEMI C1
This Specification defines the handling volume for mask substrate inside the case
orgで入手可能となる。初版は1991年発行。前版は2006年3月発行。
especially non-rectangle shape films
1-0918 (technical revision)
D02800 - SEMI D28 - AGV, RGV, MGV を用いたFPD用搬送装置とツールポートの間の機械的インタフェースの仕様 Revision:SEMI D28-1101 (Reapproved 0708) - Inactive SEMI C36-0699 (first published -NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Flat Panel Display Factory Automation Global Technical Committee2008513global Audits and Reviews Subcommittee20086www. semi. org200111 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain
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